Our full range of plasma surface treatment products
TEM Plasma Cleaner
TEM Plasma Cleaner
Our low-cost plasma cleaners/plasma ashers for TEM sample holders are designed specifically for fast and efficient cleaning.
The TEM sample plasma cleaners/plasma ashers are fully automated and come with standard adapters which are suitable for the sample holders supplied with all the major microscope manufacturers. The plasma output power is fully variable over the range 0-100W, resulting in a very controllable & gentle cleaning process. Common sources of error inside the TEM are clearly reduced with plasma cleaning and the dwell time during the measurement is significantly increased.
TEM Plasma Cleaner / Plasma Asher options:
The TEM plasma cleaner/plasma asher is an application-specific solution for low-pressure plasma cleaning and preparation of electron microscopy samples, including:
Each system is supplied with a 5.7-inch colour touchscreen which provides a rich, user-friendly interface. Variables such as gas flow rate, pressure, power level and plasma processing time can be freely set and then stored to produce a fully interlocked process cycle from a single keypress. A handy status display and end of process audible alarm informs the user of every step in the process.
Henniker HPT-100 Plasma Cleaner with JEOL TEM sample holder adapter. Continuously variable power output from 0-100W and dual digital MFC gas mixing. Samples were introduced via the front feedthrough adapter and cleaned with Ar:O2 95:5 mixture at low power (20W and 50W) in 30sec time steps.
Plasma Environment
Vacuum chamber, power and sample holders
The TEM system features either a 100mm or 150mm diameter plasma process chamber in stainless steel, borosilicate glass or quartz glass with vacuum compatible materials throughout. The application-specific TEM system is fully automated and can be supplied with standard adapters which are suitable for the sample holders supplied with all the major microscope manufacturers.
Our proprietary, high stability HPS plasma generator is continuously variable over the entire 0-100W/0-200W power range rather than being limited to discreet levels, delivering much finer control when processing delicate materials.
Benefits
Application specific
The plasma system is simple to use with a front panel touch interface providing interlocked pump down, process and vent cycles with a single keypress. Each system includes one adapter suitable for either Jeol or FEI instruments, others are available on application. A removable parts tray also allows cleaning of SEM sample stubs.
The TEM plasma cleaner/plasma asher is an application specific solution for low pressure plasma cleaning and preperation of electron microcopy samples including:
Low power operation
Front feed of TEM sample holder
Multiple TEM grids and SEM stub cleaning
Re-entrant style sample holder introduction
Dual gas inlets for O2/Ar and other gases
Specifications
Technical Specifications
HPT-100 / HPT-200 TEM Plasma Cleaners
ENCLOSURE
Dimensions
HPT-100 / HPT-200 - W 520mm x H 286mm x L 550mm (+50mm on rear for cables)
Weight
HPT-100 - ~22kg
HPT-200 - ~23kg
CHAMBER
Material
Stainless Steel
Form
Cylindrical
Dimensions
HPT-100 - 100mm dia. x 280mm L
HPT-200 - 150mm dia. x 280mm L
REMOVABLE PARTS CARRIER
Material
Aluminium
Material options
Stainless steel
Form
Flat tray
Form options
Perforated tray, others to suit application
Dimensions
HPT-100 - 90mm W x 255mm L, others to suit application
HPT-200 - 135mm W x 255mm L, others to suit application
PLASMA POWER SUPPLY
Power
HPT-100 - 0-100W, continuously variable output
HPT-200 - 0-200W, continuously variable output
Frequency
40 kHz
PROCESS CONTROL
Interface
5.7” Colour TFT with recipe store
Gas channels
x2 MFC
Gas channel options
x1 vapour inlet
Vent inlet
x1
Vent inlet options
soft ventilation option
Connections
6mm compression or 1/4" compression
Process timer
1sec – 99.59min
Pressure gauge
Pirani sensor
Vacuum pump
3 to 6 m3/hr pumping speed
Vacuum pump options
2-stage rotary pump (air/inert gas), PFPE rotary pump (oxygen compatible), dry pumps. All pumps include exhaust filter and connections
Sample holder adapter
Includes one adapter suitable for either JEOL or FEI instruments, others on application
SERVICES
Electrical
90-250 VAC, 50-60Hz, 1200-1500 VA (including pump), fused 6.3 A T / 10 A T
Power cord
Suited to region
Compliance
CE – UKCA - ROHS - WEEE
**Henniker strive for continuous improvement and specifications are subject to change without notice
Product Brochure
HPT-100 Product Brochure
The HPT-100 is a microprocessor-controlled benchtop plasma treatment system delivering out of the box reliability and repeatability and with a wide range of options.
Plasma Cleaning Explained. The third in our series of videos about plasma treatment technology, this video explains how plasma cleaning works and which systems can provide the best quality treatments.
See what our customers have to say
"The technical team at Henniker are very knowledgeable and supportive and always approachable. I have found it a pleasure to work with them."
Simon Baxter - BAE Systems, MAI
"Henniker guided us to choose the most suitable plasma unit for our application, ensured an accelerated delivery time & guided us through the very easy setup. We obtained quality results with their unit within minutes of setup & consistent results thereafter. The support they have provided has been rapid and helpful."
Dr Ravi Desai - Making Lab, Francis Crick Institute
"Henniker provided our team with excellent service during the course of our work together, the plasma cleaner arrived quickly and was installed with ease, giving us visible results from the outset and confirming that we made the right decision in choosing a local UK manufacturer."
Dr Panagiotis Manesiotis BSc MRSC - Queen’s University Belfast
"Our customers and operations demand reliability at every level and were a key factor in our decision to choose a UK based manufacturer of plasma treatment equipment."
Tom Doak - Trak Microwave
"Henniker’s after sales support is first class. They have always been extremely responsive if we have ever had need to call on them."
Steve Rackham - Teledyne
"Henniker’s plasma systems have delivered tangible benefits to us right from day one. The team there are very easy to work with."
Ian Bruce - Coopervision
"Henniker really stood out, both in their product range and technical knowledge. They are a great company to work with."
Karthik Nair - University of Bradford
"We are very impressed with the ease of use and reliability of our plasma unit and were producing results within minutes of setting it up."
Dr Neil Wilson - Warwick University
"Our collaborative work with the team at Henniker was a very positive experience and one that we look forward to developing further."
Ewen Kellar - TWI
"Henniker provided a tailored product to match our exact requirements. They are a pleasure to work with."
Dr Will Shu - Heriot Watt University
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Henniker 3 Berkeley Court, Manor Park, Runcorn, WA7 1TQ, UK