Plasma cleaning of silicon substrates for spin coating of nano-polymer films
Nanocomposite polymer thin films are finding new applications such as refractive index enhancement and as high-density electrodes for super-capacitors. Henniker plasma systems play an important role in preparing substrates by plasma cleaning prior to spin coating of the films.
Or view our dedicated Plasma treatment prior to spin coating our HPT-200 Model page for more details.
Keywords
- Polymer thin films
- Glass-transition
- Density profile
- Segmental dynamics
- Dielectric spectroscopy
- Time-of-flight secondary ion mass spectrometry
- Nanoscale confinement